interferoMETER: Powerful sensors for special requirements

With the interferoMETER series, Micro-Epsilon offers innovative white light interferometers for industrial distance and thickness measurements with highest accuracy. In contrast to laser interferometers, absolute distance measurements can also be performed during signal jumps. Resolutions down to the picometer range are realized. Three new sensors are available for high-performance measurements in special environments.

interferoMETER IMP-DS0.5/90/VAC90°

90 Grad Sensor für kleine Bauräume
  • Distance sensor for small installation spaces
  • Measuring range 1.5 mm
  • Linearity ±10 nm (depending on controller)
  • Radial beam exit
  • Design for vacuum applications up to UHV

interferoMETER IMP-DS19/VAC(001)

interferoMETER Sensor mit höchster Temperaturstabilität
  • Sensor with highest temperature stability
  • Measuring range 2.1 mm
  • Linearity ±10 nm (depending on controller)
  • Sensor material made of Invar
  • Design for vacuum applications up to UHV

interferoMETER IMP-DS1/VAC

Miniaturabstandssensor mit 4 mm Durchmesser
  • Miniature distance sensor ø4 mm
  • Measuring range 1.1 mm
  • Linearity ±10 nm (depending on controller)
  • Integrated cable for easy installation
  • Design for vacuum applications up to UHV
Interferometers (white light)
Indietro